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1.Electron beam litography and reactive ion etching for niobium nanobridges fabrication

Title	Electron beam litography and reactive ion etching for niobium nanobridges fabrication
Author	Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
Co-authors	Hudek Peter 1953- SAVINFO - Ústav informatiky SAV
	Rangelow I.W.
	Borkowicz Z.
	Beňačka Štefan 1933 SAVELEK - Elektrotechnický ústav SAV
	Stangl Guenther
Source document	/ Beňačka Štefan 1933 ; Seidel P. ; Štrbík Vladimír 1954 . P. 121-127 Weak Superconductivity : proceedings of the Seventh International Symposium. - Bratislava : IEE SAS, 1994
Category	AEC - Scientific papers in foreign peer-reviewed proceedings, monographs
Category of document (from 2022)	V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
Type of document	príspevok
Year	1994

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