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Electron beam litography and reactive ion etching for niobium nanobridges fabrication
Title Electron beam litography and reactive ion etching for niobium nanobridges fabrication Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Co-authors Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Rangelow I.W. Borkowicz Z. Beňačka Štefan 1933 SAVELEK - Elektrotechnický ústav SAV Stangl Guenther Source document / Beňačka Štefan 1933 ; Seidel P. ; Štrbík Vladimír 1954 . P. 121-127 Weak Superconductivity : proceedings of the Seventh International Symposium. - Bratislava : IEE SAS, 1994 Category AEC - Scientific papers in foreign peer-reviewed proceedings, monographs Category of document (from 2022) V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka Type of document príspevok Year 1994 
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Number of the records: 1