1. Electron beam litography and reactive ion etching for niobium nanobridges fabrication
Title : Electron beam litography and reactive ion etching for niobium nanobridges fabrication
Author : \q12*sav_un_auth*1 0000926 \q \q1013 sav_un_auth*0000926 \d Kostič Ivan 1955- \q SAVINFO - Ústav informatiky SAV
Co-authors : \q12*sav_un_auth*1 0001131 \q \q1013 sav_un_auth*0001131 \d Hudek Peter 1953- \q SAVINFO - Ústav informatiky SAV
: \q12*sav_un_auth*1 0001877 \q \q1013 sav_un_auth*0001877 \d Rangelow I.W. \q
: \q12*sav_un_auth*1 0016198 \q \q1013 sav_un_auth*0016198 \d Borkowicz Z. \q
: \q12*sav_un_auth*1 0000013 \q \q1013 sav_un_auth*0000013 \d Beňačka Štefan 1933 \q SAVELEK - Elektrotechnický ústav SAV
: \q12*sav_un_auth*1 0001878 \q \q1013 sav_un_auth*0001878 \d Stangl Guenther \q
Source document : \q12**1 122092 \q / \q12*sav_un_auth*1 0000013 \q Beňačka Štefan 1933 ; \q12*sav_un_auth*1 0015370 \q Seidel P. ; \q12*sav_un_auth*1 0000055 \q Štrbík Vladimír 1954 . P. 121-127 Weak Superconductivity : proceedings of the Seventh International Symposium. - Bratislava : IEE SAS, 1994
Category : AEC - Scientific papers in foreign peer-reviewed proceedings, monographs
Category of document (from 2022) : V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
Type of document : príspevok
Year : 1994