Middleman, Stanley Process engineering analysis in semiconductor device fabrication / Stanley Middleman, Arthur K. Hochberg. -- New York : McGraw-Hill, 1993. -- 774 s. : obr., tab. ; 24 cm. -- (McGraw-Hill Chemical Engineering Series). -- ISBN 0-07-041853-5 (viaz.) : 3000.00

I. Hochberg, Arthur K.

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