- The AZ 5214E resist in EBDW lithography and its use as a RIE etch-mas…
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The AZ 5214E resist in EBDW lithography and its use as a RIE etch-mask in etching thin Ag layers in N2 plasma

  1. ANDOK, Robert - BENČUROVÁ, Anna - HRKÚT, Pavol - KONEČNÍKOVÁ, Anna - MATAY, Ladislav - NEMEC, Pavol - ŠKRINIAROVÁ, Jaroslava. The AZ 5214E resist in EBDW lithography and its use as a RIE etch-mask in etching thin Ag layers in N2 plasma. In Journal of Electrical Engineering, 2013, vol. 64, no. 6, p. 371-375. (2013 - WOS, SCOPUS, INSPEC). ISSN 1335-3632. Dostupné na: https://doi.org/10.2478/jee-2013-0056
    :Ohlasy:
    :[3.1] ZHUKOV, A.A. - ILYIN, E.Y. - GERASIMENKO, N.N. Influence of photolithographic process conditions on obtaining a negative tilt of thick positive photoresist mask. InIzvestija vysšich učebnych zavedenij, elektronika. ISSN 1561-5405, 2015, vol. 20, no. 4, pp. 440-442.
    :[1.1] VAIDULYCH, Mykhailo - HANUS, Jan - STEINHARTOVA, Tereza - KYLIAN, Ondrej - CHOUKOUROV, Andrei - BERANOVA, Jana - KHALAKHAN, Ivan - BIEDERMAN, Hynek. Deposition of Ag/a-C:H nanocomposite films with Ag surface enrichment. In PLASMA PROCESSES AND POLYMERS. ISSN 1612-8850, 2017, vol. 14, no. 11, pp., Registrované v: WOS
    :[1.1] TOBING, Landobasa Y. M. - MUELLER, Aaron D. - TONG, Jinchao - ZHANG, Dao Hua. Nanobridges formed through electron beam image reversal lithography for plasmonic mid-infrared resonators with high aspect ratio nanogaps. In NANOTECHNOLOGY. ISSN 0957-4484, 2019, vol. 30, no. 42, pp., Registrované v: WOS
    :[1.1] ZHAO, Shaoqing - ZHANG, Han - LIU, Yu-Qing - HUANG, Long - GUAN, Ruihua - CHEN, Yanpin - CONG, Yuxuan - HONG, Zhihan - WANG, Zhi - LIU, Hua. Spatial Light Modulator-based printing technologies for optical elements fabrication with different materials. In JOURNAL OF MANUFACTURING PROCESSES, 2025, vol. 144, no., pp. 60-77. ISSN 1526-6125. Dostupné na: https://doi.org/10.1016/j.jmapro.2025.04.019., Registrované v: WOS
    :[1.1] ALHASAN, Seba Nur - MIRBAKHT, S. Sajjad - GULER, Saygun - SAHIN, Osman - UMAR, Muhammad - KUZUBASOGLU, Burcu Arman - YAPICI, Murat Kaya. Artificially Weaved Textile-like Surface Micromachined Graphene-Polymer Flexible Bioelectrodes. In ADVANCED MATERIALS TECHNOLOGIES, 2025, vol. 10, no. 14. ISSN 2365-709X. Dostupné na: https://doi.org/10.1002/admt.202402032., Registrované v: WOS
    :[1.1] SATO, Mina - TOHNISHI, Mie - FUJIMOTO, Miho - MATSUTANI, Akihiro. Sub-micrometer-sized Patterning of Photoresist by Electron Beam Projection Lithography Using Tabletop Scanning Electron Microscopy System and Stencil Masks. In SENSORS AND MATERIALS, 2025, vol. 37, no. 3. ISSN 0914-4935. Dostupné na: https://doi.org/10.18494/SAM5547., Registrované v: WOS
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